Vacuum coating equipment is composed of a lot of precision parts, these parts are produced through a lot of mechanical processing processes, such as welding, grinding, turning, planing, boring, milling and other processes. Because of these operations, the surface of equipment parts will inevitably be contaminated with some of the processing brought by grease, grease, metal chips, flux, polishing paste, sweat marks and other pollutants. These pollutants are volatile under vacuum conditions, thus affecting the ultimate vacuum of equipment.
In addition, these vacuum pollutants brought by mechanical processing absorb a large number of gases in the atmospheric pressure environment, and in the vacuum state, these original adsorbed gases will be released again, becoming a major factor limiting the ultimate vacuum of the vacuum system. To this end, pollutants must be removed before the vacuum coating machine parts are assembled.
In the process of using vacuum equipment, its parts will be contaminated. However, this source of pollution is mainly caused by conditions of use and vacuum pumps.
1.due to the workpiece sputtering, the inner wall of ion beam etching equipment will be contaminated by spatter;
2. The inner wall of the vacuum evaporation coating equipment will be polluted by the evaporation target material;
3. the vacuum tube filament evaporation under high temperature conditions, will lead to the formation of a layer of film on the ceramic insulator, the insulation strength has a certain damage, the accuracy of its measurement also has a certain impact;
4. Due to high temperature evaporation, a metal film will be formed on the surface near the filament of the electron gun in vacuum;
5. Vacuum drying system is often used, which will be polluted by evaporating substances;
6. Diffusion pump oil and mechanical pump oil in vacuum coating equipment are a major source of pollution. After long-term operation of the coating machine, a layer of oil film may be formed inside the equipment.
To sum up, the equipment of vacuum health involves the vacuum equipment, vacuum systems, vacuum process and so on various aspects and links, involving the vacuum coating equipment itself and the special vacuum technology for conditions of use requirement, therefore, should be valued on their vacuum pollution is a problem, because these pollution will affect the equipment performance, should pay attention to clean homework regularly or at any time.